Recently  we have developed an atomic oxygen simulation facility based on  negative oxygen ion source. The key part of the facility is forever  magnet negative PIG ion source. Between the cathode and the anticathode  of the PIG ion source the forever magnet constitute a exhaling magnet  field which restrain the transgression of electron. Through derivation  system that works on -2000—-3000v  the negative oxygen ion was educed which then pass through the focusing  system to the electron filer at last eradiated on the specimen with  energy about 5ev after deceleration. Using film mass lost method we get  the equivalent flux is 9.4×10¹⁴cm^-2s^-1.

1- PIG ion source  2- derivation system  3-singel lens  4-electron filter 5-intersection field analyzer  6-deceleration mesh  7-specimen fixation

8-PIG ion source power supply  9-derivation power supply 10-focusing power supply  11- intersection field analyzer power supply  12-vacuum chamber

        Figure 1. Sketch map of atomic oxygen simulation facility